Course Descriptions

The Course Descriptions catalog describes all undergraduate and graduate courses offered by Michigan State University. The searches below only return course versions Fall 2000 and forward. Please refer to the Archived Course Descriptions for versions prior to Fall 2000.

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ECE 871  Micro-electro-mechanical Systems Fabrication

Semester:
Spring of every year
Credits:
Total Credits: 3   Lecture/Recitation/Discussion Hours: 3
Prerequisite:
ECE 870 or ECE 477
Description:
Development of a complete integrated microsystem from inception to final test. Design, fabrication and testing of integrated microsystems. Development of a complete multichip microsystem containing sensors, signal processing, and an output interface. Basic MOS device and circuit processes, wafer bonding and micromachining, low power portable devices and diamond MEMS chips.
Effective Dates:
SS04 - FS22


ECE 871  Micro-electro-mechanical Systems Fabrication

Semester:
Spring of every year
Credits:
Total Credits: 3   Lecture/Recitation/Discussion Hours: 3
Recommended Background:
ECE 477
Description:
Design, simulation, fabrication and testing of integrated microsystems. Development of a complete microsystem containing sensors and actuators using Silicon On Glass (SOG) MEMS process. Basic E/D MOS circuits chips will designed and simulated but will not be fabricated. Fabricated MEMS chips will be tested.
Effective Dates:
SS23 - Open